In NFV networks, service functions (SFs) can be deployed on virtual machines (VMs) across multiple domains and then form a service function chain (MSFC) for end-to-end network service provision. However, any software component in a VM-based MSFC must experience software aging issue after a long period of operation. This paper quantitatively investigates the capability of proactive rejuvenation techniques in reducing the damage of software aging on a VM-based MSFC. We develop a semi-Markov model to capture the behaviors of SFs, VMs and virtual machine monitors (VMMs) from software aging to recovery under the condition that failure times and recovery times follow general distributions. We derive the formulas for calculating the steady-state availability and reliability of the VM-based MSFC composed of multiple SFs running on VMs hosted by VMMs. Sensitivity analysis is also conducted to identify potential dependability bottlenecks.