Retrieval-Augmented Generation (RAG) aims to enhance large language models (LLMs) to generate more accurate and reliable answers with the help of the retrieved context from external knowledge sources, thereby reducing the incidence of hallucinations. Despite the advancements, evaluating these systems remains a crucial research area due to the following issues: (1) Limited data diversity: The insufficient diversity of knowledge sources and query types constrains the applicability of RAG systems; (2) Obscure problems location: Existing evaluation methods have difficulty in locating the stage of the RAG pipeline where problems occur; (3) Unstable retrieval evaluation: These methods often fail to effectively assess retrieval performance, particularly when the chunking strategy changes. To tackle these challenges, we propose a Comprehensive Full-chain Evaluation (CoFE-RAG) framework to facilitate thorough evaluation across the entire RAG pipeline, including chunking, retrieval, reranking, and generation. To effectively evaluate the first three phases, we introduce multi-granularity keywords, including coarse-grained and fine-grained keywords, to assess the retrieved context instead of relying on the annotation of golden chunks. Moreover, we release a holistic benchmark dataset tailored for diverse data scenarios covering a wide range of document formats and query types. We demonstrate the utility of the CoFE-RAG framework by conducting experiments to evaluate each stage of RAG systems. Our evaluation method provides unique insights into the effectiveness of RAG systems in handling diverse data scenarios, offering a more nuanced understanding of their capabilities and limitations.