Large language models (LLMs) inevitably make mistakes when performing step-by-step mathematical reasoning. Process Reward Models (PRMs) have emerged as a promising solution by evaluating each reasoning step. However, existing PRMs typically output evaluation scores directly, limiting both learning efficiency and evaluation accuracy, which is further exacerbated by the scarcity of annotated data. To address these issues, we propose Reasoning-Driven Process Reward Modeling (R-PRM). First, we leverage stronger LLMs to generate seed data from limited annotations, effectively bootstrapping our model's reasoning capabilities and enabling comprehensive step-by-step evaluation. Second, we further enhance performance through preference optimization, without requiring additional annotated data. Third, we introduce inference-time scaling to fully harness the model's reasoning potential. Extensive experiments demonstrate R-PRM's effectiveness: on ProcessBench and PRMBench, it surpasses strong baselines by 11.9 and 8.5 points in F1 scores, respectively. When applied to guide mathematical reasoning, R-PRM achieves consistent accuracy improvements of over 8.5 points across six challenging datasets. Further analysis reveals that R-PRM exhibits more comprehensive evaluation and stronger generalization capabilities, thereby highlighting its significant potential.