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Gradient-based inverse lithography for EUV masks via the ...
[Submitted on 24 Jun 2026] · 2026-06-25 · via cs.LG updates on arXiv.org

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Abstract:Gradient-based inverse lithography technology~(ILT) for extreme ultraviolet~(EUV) masks is presented. A novel framework treats the differentiable waveguide method and the recently proposed waveguide neural operator~(WGNO) as end-to-end physics engines, recovering the permittivity of the absorber of the mask through automatic differentiation of the full forward diffraction model. Numerical experiments on realistic 2D and 3D absorbers of the mask (TaBN, La, U) at $\lambda{=}11.2$~nm show that the considered ILT methods make it possible to obtain a mask structure that achieves the desired field on the wafer.

Submission history

From: Vasiliy A. Es'kin [view email]
[v1] Wed, 24 Jun 2026 12:22:48 UTC (396 KB)