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eess.SP updates on arXiv.org

ECG-biometrics-bench: A Unified Framework for Reproducible Benchmarking of ECG Biometrics Physiology-Aware Masked Cross-Modal Reconstruction for Biosignal Representation Learning Towards Improving Speaker Distance Estimation through Generative Impulse Response Augmentation Federated Learning with Hypergradient-based Online Update of Aggregation Weights Soft Graph Diffusion Transformer for MIMO Detection SPLICE: Latent Diffusion over JEPA Embeddings for Conformal Time-Series Inpainting Sequential Inference for Gaussian Processes: A Signal Processing Perspective Statistical Channel Fingerprint Construction for Massive MIMO: A Unified Tensor Learning Framework Recent Advances in mm-Wave and Sub-THz/THz Oscillators for FutureG Technologies Cross-Subject Generalization for EEG Decoding: A Survey of Deep Learning Methods Super-resolution Multi-signal Direction-of-Arrival Estimation by Hankel-structured Sensing and Decomposition Hankel and Toeplitz Rank-1 Decomposition of Arbitrary Matrices with Applications to Signal Direction-of-Arrival Estimation Adaptive Transform Coding for Semantic Compression EdgeSpike: Spiking Neural Networks for Low-Power Autonomous Sensing in Edge IoT Architectures Sparse Graph Learning from Sparse Data via Fiedler Number Maximization A Deep Learning Model for Battery State Prediction towards Intelligent Energy Management Transfer Learning for Tonal Noise Prediction in VRF Units Using Thermodynamic and Vibration Signals EVT-Based Generative AI for Tail-Aware Channel Estimation Monitoring exposure-length variations in submarine power cables using distributed fiber-optic sensing BandRouteNet: An Adaptive Band Routing Neural Network for EEG Artifact Removal Phase-Separated Complex Hilbert PCA on Markerless 3D Pose Estimation Data: A Global Phase Network and Its Extension to a Continuous Field on the Body Surface Selective Correlation Based Knowledge Distillation for Ground Reaction Force Estimation Deep Learning-Enabled Dissolved Oxygen Sensing in Biofouling Environments for Ocean Monitoring Speech Enhancement Based on Drifting Models Robust and Clinically Reliable EEG Biomarkers: A Cross Population Framework for Generalizable Parkinson's Disease Detection An AI-Based Supervisory Measurement Integrity Validation Layer for Cyber-Resilient AC/DC Protection in Inverter-Based Microgrids Explainable AI in Speaker Recognition -- Making Latent Representations Understandable Time-Localized Parametric Decomposition of Respiratory Airflow for Sub-Breath Analysis NAKUL-Med: Spectral-Graph State Space Models with Dynamics Kernels for Medical Signals An Algorithm for On-Sensor Agnostic Detection of Changes in Human Activity for Ultra-Low-Power Applications
Millimeter Wave Thin-Film Bulk Acoustic Resonator in Sput...
Sinwoo Cho, Omar Barrera, Pietro Simeoni, Emily N. Marshall, Jac · 2023-09-07 · via eess.SP updates on arXiv.org

This work reports a millimeter wave (mmWave) thin-film bulk acoustic resonator (FBAR) in sputtered scandium aluminum nitride (ScAlN). This paper identifies challenges of frequency scaling sputtered ScAlN into mmWave and proposes a stack and new fabrication procedure with a sputtered Sc0.3Al0.7N on Al on Si carrier wafer. The resonator achieves electromechanical coupling (k2) of 7.0% and quality factor (Q) of 62 for the first-order symmetric (S1) mode at 21.4 GHz, along with k2 of 4.0% and Q of 19 for the third-order symmetric (S3) mode at 55.4 GHz, showing higher figures of merit (FoM, k2xQ) than reported AlN/ScAlN-based mmWave acoustic resonators. The ScAlN quality is identified by transmission electron microscopy (TEM) and X-ray diffraction (XRD), identifying the bottlenecks in the existing piezoelectric-metal stack. Further improvement of ScAlN/AlN-based mmWave acoustic resonators calls for better crystalline quality from improved thin-film deposition methods.