The development of foundation models for embodied intelligence critically depends on access to large-scale, high-quality robot demonstration data. Recent approaches have sought to address this challenge by training on large collections of heterogeneous robotic datasets. However, unlike vision or language data, robotic demonstrations exhibit substantial heterogeneity across embodiments and action spaces as well as other prominent variations such as senor configurations and action control frequencies. The lack of explicit designs for handling such heterogeneity causes existing methods to struggle with integrating diverse factors, thereby limiting their generalization and leading to degraded performance when transferred to new settings. In this paper, we present HiMoE-VLA, a novel vision-language-action (VLA) framework tailored to effectively handle diverse robotic data with heterogeneity. Specifically, we introduce a Hierarchical Mixture-of-Experts (HiMoE) architecture for the action module which adaptively handles multiple sources of heterogeneity across layers and gradually abstracts them into shared knowledge representations. Through extensive experimentation with simulation benchmarks and real-world robotic platforms, HiMoE-VLA demonstrates a consistent performance boost over existing VLA baselines, achieving higher accuracy and robust generalization across diverse robots and action spaces. The code and models are publicly available at https://github.com/ZhiyingDu/HiMoE-VLA.