High-precision controllable remote sensing image generation is both meaningful and challenging. Existing diffusion models often produce low-fidelity images due to their inability to adequately capture morphological details, which may affect the robustness and reliability of object detection models. To enhance the accuracy and fidelity of generated objects in remote sensing, this paper proposes Object Fidelity Diffusion (OF-Diff), which effectively improves the fidelity of generated objects. Specifically, we are the first to extract the prior shapes of objects based on the layout for diffusion models in remote sensing. Then, we introduce a dual-branch diffusion model with diffusion consistency loss, which can generate high-fidelity remote sensing images without providing real images during the sampling phase. Furthermore, we introduce DDPO to fine-tune the diffusion process, making the generated remote sensing images more diverse and semantically consistent. Comprehensive experiments demonstrate that OF-Diff outperforms state-of-the-art methods in the remote sensing across key quality metrics. Notably, the performance of several polymorphic and small object classes shows significant improvement. For instance, the mAP increases by 8.3%, 7.7%, and 4.0% for airplanes, ships, and vehicles, respectively.