This survey delves into the realm of Parameter-Efficient Fine-Tuning (PEFT) within the context of Foundation Models (FMs). PEFT, a cost-effective fine-tuning technique, minimizes parameters and computational complexity while striving for optimal downstream task performance. FMs, like ChatGPT, DALL-E, and LLaVA specialize in language understanding, generative tasks, and multimodal tasks, trained on diverse datasets spanning text, images, and videos. The diversity of FMs guides various adaptation strategies for PEFT. Therefore, this survey aims to provide a comprehensive overview of PEFT techniques applied to diverse FMs and address critical gaps in understanding the techniques, trends, and applications. We start by providing a detailed development of FMs and PEFT. Subsequently, we systematically review the key categories and core mechanisms of PEFT across diverse FMs to offer a comprehensive understanding of trends. We also explore the most recent applications across various FMs to demonstrate the versatility of PEFT, shedding light on the integration of systematic PEFT methods with a range of FMs. Furthermore, we identify potential research and development directions for improving PEFTs in the future. This survey provides a valuable resource for both newcomers and experts seeking to understand and use the power of PEFT across FMs. All reviewed papers are listed at \url{https://github.com/THUDM/Awesome-Parameter-Efficient-Fine-Tuning-for-Foundation-Models}.