As large language models (LLMs) continue to advance, reliable evaluation methods are essential particularly for open-ended, instruction-following tasks. LLM-as-a-Judge enables automatic evaluation using LLMs as evaluators, but its reliability remains uncertain. In this work, we analyze key factors affecting its trustworthiness, focusing on alignment with human judgments and evaluation consistency. Using BIGGENBench and EvalBiasBench, we study the effects of evaluation design, decoding strategies, and Chain-of-Tought (CoT) reasoning in evaluation. Our results show that evaluation criteria are critical for reliability, non-deterministic sampling improves alignment with human preferences over deterministic evaluation, and CoT reasoning offers minimal gains when clear evaluation criteria are present.